发明名称 PROBE HEAD SCANNING PROBE MICROSCOPE INCLUDING THE SAME
摘要 A probe head and a scanning probe microscope (SPM) including the probe head are provided. The probe head includes a plurality of cantilevers, each including a probe; and a holder on which the plurality of cantilevers are installed, wherein a cantilever facing a sample is changed by rotating the holder.
申请公布号 US2013111635(A1) 申请公布日期 2013.05.02
申请号 US201213568768 申请日期 2012.08.07
申请人 JEON IN-SU;SAMSUNG ELECTRONICS CO., LTD. 发明人 JEON IN-SU
分类号 G01Q70/02;G01Q20/02 主分类号 G01Q70/02
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