| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aerosol generation apparatus that can generate a stable aerosol having a desired powder concentration and to provide a film deposition apparatus. <P>SOLUTION: The aerosol generation apparatus comprises a powder supply apparatus 4 that supplies a fine powder into the inside space of a generation container 2 and a gas supply apparatus 5 that supplies a gas as a dispersion medium into the inside space of the generation container 2, and can easily achieve a desired powder concentration by independently controlling the supply of the fine powder and the supply of the gas as the dispersion medium. Further, the powder concentration distribution of the generated aerosol in the inside space of the container can be made uniform because the fine powder can always be supplied into the swirl from the most upstream part in the axial flow direction of the swirl by locating a powder supply inlet 4d and a gas supply inlet 5b lower in the vertical direction than an impeller 3 and therefore a change in the dispersedness of the fine powder in the swirl is reduced. <P>COPYRIGHT: (C)2013,JPO&INPIT |
