| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a crystal solar cell capable of improving photoelectric conversion efficiency by reducing resistance of a p-type semiconductor layer provided on one principal surface of a crystal substrate and resistance of an n-type semiconductor layer provided on the other principal surface of the crystal substrate. <P>SOLUTION: A manufacturing method of a crystal solar cell 100 having a crystal substrate which exhibits a photoelectric conversion function between a light-receiving surface and a rear surface facing the light-receiving surface comprises, in order, at least: a first step of forming a p-type semiconductor layer 102 by implanting a p-type ion in a one principal surface 101b side of a plate-like base 101 composed of a p-type monocrystal or polycrystal silicon using the base 101 as the crystal substrate; a second step of performing first annealing processing for the base 101; a third step of forming an n-type semiconductor layer 103 by implanting an n-type ion in the other principal surface 101a side of the base 101; and a fourth step of performing second annealing processing for the base 101. <P>COPYRIGHT: (C)2013,JPO&INPIT |
