THERMOELECTRIC CONVERSION ELEMENT

摘要

A thermoelectric conversion element is provided as an element module with improved utility having an enhanced performance index and utilizing Fe2VAl type alloy thin-film under the condition of the drop in thermal conductivity. The structure of thermoelectric conversion element is comprised of a conductive buffer layer and plural repeating stages of single structures including thermoelectric conversion material layer and a conductive buffer layer, over a buffer layer formed on a substrate; and each of the thermoelectric conversion material layers is comprised of Full-Heusler alloy or Full-Heusler alloy thin film in a thickness range between 1 nm to 200 nm.