| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wavelength variable filter having excellent optical characteristics without causing an increase in a drive voltage. <P>SOLUTION: A second base plate 3 has two faces having a different position in the thickness direction on a movable part 21 side. One of the two faces has a drive electrode 33 and the other face has a detection electrode 40. An electrostatic attraction is generated between the drive electrode 33 and the movable part 21 to displace the movable part 21 by generating the electrical potential difference therebetween based on a capacitance between the detection electrode 40 and the movable part 21. Light reflection is repeated between a fixed reflection coating 35 and a movable reflection coating 25 to generate interference, so that light having a wavelength corresponding to a distance between the fixed reflection coating 35 and the movable reflection coating 25 can be emitted outside. <P>COPYRIGHT: (C)2013,JPO&INPIT |
