发明名称 |
TRANSPARENT CONDUCTIVE ZNO THIN FILMS PREPARED BY ELECTROSPRAYING METHOD |
摘要 |
PURPOSE: A manufacturing method for a Zno(zinc oxide) transparent conductive thin film is provided to improve permeability by doping aluminum in an oxidation zinc thin film using a simple method. CONSTITUTION: Zinc salt and aluminum salt are added to a solvent. A precursor solution is produced from the added solvent. The produced precursor solution is sprayed with electricity on a substrate. Zinc oxide sprayed to with electricity is deposited on the substrate. The substrate deposited with the zinc oxide is heat-treated at temperatures of 300°C to 600°C. |
申请公布号 |
KR101212193(B1) |
申请公布日期 |
2012.12.13 |
申请号 |
KR20110071127 |
申请日期 |
2011.07.18 |
申请人 |
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
PARK, SEUNG BIN;MAHMOOD KHALID;SONG, DONG SU |
分类号 |
H01L21/20;H01B5/14;H01L31/04;H01L41/22 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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