IMAGE ACQUISITION APPARATUS, PATTERN INSPECTION APPARATUS, AND IMAGE ACQUISITION METHOD

摘要

PURPOSE: An image obtaining device, a pattern inspection device, and an image obtaining method are provided to obtain images of high contrast at low costs. CONSTITUTION: An image obtaining device comprises a light irradiating unit, a line sensor(1132), a moving device, and an angle change device. The light irradiating unit emits light of wavelength having transparency with respect to thin film patterns. The line sensor receives lights from a photographing region where the lights are irradiated. The moving device moves a base to a direction across the photographing region relatively with respect to the photographing region. The angle change device changes an irradiation angle in which an optical shaft reaching the photographing region from the light irradiating unit and a perpendicular line of the base forms and a detection angle in which an optical shaft reaching the line sensor from the photographing region and the perpendicular line form while maintaining the irradiation angle and the detection angle to be identical.