| 摘要 |
A device for focusing a microscope objective on a sample accurately with a high spatial resolution. The device has a positioning unit having a main body, an objective holder movably supported on the main body and adapted to hold the microscope objective, and an actuator for moving the objective holder along the optical axis of the microscope objective. The objective holder holds the microscope objective only at a front portion of the microscope objective facing the sample. The positioning unit includes one or more lever arms, each of which coupled at its one end via a first flexure bearing to the main body and at its other end via a second flexure bearing to the objective holder. The main body of the positioning unit is attached to a stage that carries the sample. |
