| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an SiC tool material for firing, which is excellent in thermal shock resistance and is equipped with a coating film that is excellent in adhesion to an SiC substrate and is capable of imparting a higher antioxidative effect. <P>SOLUTION: The SiC tool material for firing comprises the porous SiC substrate and the oxide film formed on an SiC crystal surface of the substrate. Here, the oxide film has a composition comprising ≥65 to ≤90 wt.% SiO<SB POS="POST">2</SB>and the balance being Al<SB POS="POST">2</SB>O<SB POS="POST">3</SB>and Y<SB POS="POST">2</SB>O<SB POS="POST">3</SB>, wherein the weight composition ratio of Al<SB POS="POST">2</SB>O<SB POS="POST">3</SB>to Y<SB POS="POST">2</SB>O<SB POS="POST">3</SB>is from 20:80 to 60:40. <P>COPYRIGHT: (C)2012,JPO&INPIT |
