发明名称 INTRA-CAVITY ELLIPSOMETER SYSTEM AND METHOD
摘要 A resonant optical cavity ellipsometer system is provided. The system can be used to conduct time-dependent arid sensitive measurement of ellipsometric parameters of matter. In a particular use, the system can provide time resolution abetter than 1 microsecond. In a particular implementation, matter can be probed within the evanescent wave generated by intra-cavity total reflection.
申请公布号 US2012069336(A1) 申请公布日期 2012.03.22
申请号 US201013265841 申请日期 2010.05.04
申请人 RAKITZIS THEODORE PETER 发明人 RAKITZIS THEODORE PETER
分类号 G01J4/00 主分类号 G01J4/00
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