发明名称 |
Life estimating method for heater wire, heating apparatus, storage medium, and life estimating system for heater wire |
摘要 |
A method of estimating the life of a heater wire, including the steps of: detecting a maximum value of electric power supplied to the heater wire during a temperature rising period during which a temperature is elevated to a preset heating temperature, obtaining an index indicative of the amplitude of the electric power, and giving a notice that the heater wire is approaching the end of its life when the electric power and the index indicative of the of amplitude of the electric power exceed threshold values respectively provided thereto. |
申请公布号 |
US8121799(B2) |
申请公布日期 |
2012.02.21 |
申请号 |
US20080081404 |
申请日期 |
2008.04.15 |
申请人 |
TERASAWA NOBUTOSHI;OBATA MINORU;KOYAMA NORIAKI;TOKYO ELECTRON LIMITED |
发明人 |
TERASAWA NOBUTOSHI;OBATA MINORU;KOYAMA NORIAKI |
分类号 |
G01B3/44;G01B3/52;G01N37/00 |
主分类号 |
G01B3/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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