发明名称 Life estimating method for heater wire, heating apparatus, storage medium, and life estimating system for heater wire
摘要 A method of estimating the life of a heater wire, including the steps of: detecting a maximum value of electric power supplied to the heater wire during a temperature rising period during which a temperature is elevated to a preset heating temperature, obtaining an index indicative of the amplitude of the electric power, and giving a notice that the heater wire is approaching the end of its life when the electric power and the index indicative of the of amplitude of the electric power exceed threshold values respectively provided thereto.
申请公布号 US8121799(B2) 申请公布日期 2012.02.21
申请号 US20080081404 申请日期 2008.04.15
申请人 TERASAWA NOBUTOSHI;OBATA MINORU;KOYAMA NORIAKI;TOKYO ELECTRON LIMITED 发明人 TERASAWA NOBUTOSHI;OBATA MINORU;KOYAMA NORIAKI
分类号 G01B3/44;G01B3/52;G01N37/00 主分类号 G01B3/44
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