发明名称 |
SEMICONDUCTOR HIGH-SPEED INTEGRATED ELECTRO-OPTIC DEVICES AND METHODS |
摘要 |
Novel integrated electro-optic structures such as modulators and switches and methods for fabrication of the same are disclosed in a variety of embodiments. In an illustrative embodiment, a device includes a substrate with a waveguide and an optical resonator comprising polycrystalline silicon positioned on the substrate. First and second doped semiconducting regions also comprise polycrystalline silicon and are positioned proximate to the first optical resonator. The first optical resonator is communicatively coupled to the waveguide. |
申请公布号 |
US2011293216(A1) |
申请公布日期 |
2011.12.01 |
申请号 |
US201113049400 |
申请日期 |
2011.03.16 |
申请人 |
LIPSON MICHAL;MANIPATRUNI SASIKANTH;PRESTON KYLE;SCHMIDT BRADLEY;CORNELL UNIVERSITY |
发明人 |
LIPSON MICHAL;MANIPATRUNI SASIKANTH;PRESTON KYLE;SCHMIDT BRADLEY |
分类号 |
G02B6/12;G02B6/132;G02B6/134;H01L33/58 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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