发明名称 PHOTORESIST COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN USING THE SAME
摘要 A photoresist composition suitable for forming a high-resolution pattern, and a method of forming a photoresist pattern using the same. The photoresist composition includes about 10 to about 45 parts by weight of an alkali soluble binder resin including a hydroxyl group, about 0.1 to about 5 parts by weight of a photo-acid generator, about 1 to about 5 parts by weight of a cross-linker that cross-links the alkali-soluble binder resin including the hydroxyl group, about 0.3 to about 3 parts by weight of a quinone diazide compound, and a remainder of a solvent.
申请公布号 US2011294243(A1) 申请公布日期 2011.12.01
申请号 US201113092629 申请日期 2011.04.22
申请人 发明人 JEON WOO-SEOK;PARK JEONG-MIN;KIM BYUNG-UK;YOUN HYOC-MIN;KOO KI-HYUK;CHOI SU-YOUN;KIM JIN-SUN
分类号 H01L33/08;G03F7/004;G03F7/20 主分类号 H01L33/08
代理机构 代理人
主权项
地址