PRESSURE GAGE BUILT AROUND THIN-FILM NANO- AND MICRO-ELECTROMECHANICAL SYSTEM

摘要

FIELD: physics. ^ SUBSTANCE: proposed pressure gage comprises housing nano- and micro-electromechanical system consisting of round flexible membrane with rigidly mounted edges. Said system has heterogeneous thin-film structures formed therein and strain gages made up of identical strain elements jointed by thin-film webs made from low-resistance material and ring and radial strain gages connected in opposite branches of measuring bridge. Said strain gages represent identical-shape strain elements connected by thin-film webs and are arranged along circumference on membrane periphery. Output conductor connects strain gages with sealed leadouts. Proposed device differs from known designs in that transducer component characteristics are interrelated by appropriate relationship ^ EFFECT: reduced measurement error due to optimised relationship of device components. ^ 4 dwg