SENSOR DEVICE, METHOD OF MANUFACTURING SENSOR DEVICE, MOTION SENSOR, AND METHOD OF MANUFACTURING MOTION SENSOR

摘要

A sensor device includes: a silicon substrate; a first electrode provided at an active surface side of the silicon substrate; an external connection terminal provided at the active surface side so as to be electrically connected to the first electrode; a stress relief layer provided between the silicon substrate and the external connection terminal; and a vibrating gyro element as a sensor element including a extraction electrode. The vibrating gyro element is held to the silicon substrate by connection between the extraction electrode and the external connection terminal.