| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-accuracy probe card which is easy in repairing a probe unit, when mounting the probe unit on a substrate, and to provide a method of manufacturing the probe card. SOLUTION: The method of manufacturing the probe card mounted with a plurality of probe units formed with a plurality of probes on one substrate, includes the steps of: producing the probe unit by bonding, using an adhesive, a first probe substrate formed with a plurality of probes and a plurality of posts in the same height, and a second probe substrate formed with an alignment mark on one surface; positioning the probe unit to the substrate by using the alignment mark, while fixing the posts on a flat plate with one probe unit being temporarily fixed on the flat plate; fixing the second probe substrate of the positioned probe unit to the substrate; and removing the posts from the probe unit by removing the flat plate from the probe unit. COPYRIGHT: (C)2011,JPO&INPIT
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