THIN-FILM BATTERY METHODS FOR COMPLEXITY REDUCTION
摘要
Thin-film battery methods for complexity reduction are described. Processing equipment arrangements suitable to support thin-film battery methods for complexity reduction are also described. Cluster tools to support thin-film battery methods for complexity reduction are also described.
申请公布号
WO2011037867(A2)
申请公布日期
2011.03.31
申请号
WO2010US49535
申请日期
2010.09.20
申请人
APPLIED MATERIALS, INC.;KWAK, BYUNG-SUNG;KRISHNA, NETY, M.
