发明名称 Magnetron control method, magnetron service life judgment method, microwave generation device, magnetron service life judgment device, processing device, computer program, and storage medium
摘要 A microwave generation device includes: a magnetron having a cathode containing a filament and an anode containing a hollow resonator arranged to oppose to each other; a filament current measuring unit; and an application voltage measuring unit for measuring voltage applied to the filament. Based on the current and the voltage obtained by the current measuring unit and the voltage measuring unit, a resistance value calculation unit obtains a resistance value of the filament. A temperature calculation unit calculates the filament temperature from the resistance value and the resistance-temperature dependent characteristic. A filament power source is controlled by a power control unit so that the filament temperature is within a predetermined temperature range.
申请公布号 US7915827(B2) 申请公布日期 2011.03.29
申请号 US20080044625 申请日期 2008.03.07
申请人 TOKYO ELECTRON LIMITED 发明人 KASAI SHIGERU;OSADA YUKI
分类号 H01J25/50 主分类号 H01J25/50
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