| 摘要 |
PROBLEM TO BE SOLVED: To provide a filament structure for an electron beam source performing economically a replacement work of a filament to be bridged between filament support members, and enhancing strength of the filament support members. SOLUTION: In this filament structure 30 for bridging the filament 33 between filament support members 32, glassy carbon is used for the two filament support members 32 to be fixed at a prescribed interval on an insulating substrate 31. A bonding chip 34 having a U-shaped section is mounted detachably on the tip part of each filament support member 32, and the filament 33 is connected detachably between the filament support members 32 by using the bonding chips 34. COPYRIGHT: (C)2011,JPO&INPIT
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