发明名称 NON-LIGHTING INSPECTION APPARATUS
摘要 PROBLEM TO BE SOLVED: To perform proper inspection by reducing smear and blooming, and to reduce false determination by adjusting the range of backlight. SOLUTION: The non-lighting inspection apparatus performing the non-lighting inspection of a panel under inspection includes a line camera which is provided facing a transfer unit to capture an image of the panel under inspection transferred by the transfer unit, a backlight which is placed facing the line camera to apply light to the panel under inspection, a panel sensor which detects the position of the panel under inspection transferred by the transfer unit on the upstream of the line camera; a light control plate which controls the light from the backlight to make it enter the line camera efficiently, and a control unit which turns on the backlight after the set time until the panel under inspection enters the field of view of the line camera. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010266284(A) 申请公布日期 2010.11.25
申请号 JP20090116695 申请日期 2009.05.13
申请人 MICRONICS JAPAN CO LTD 发明人 MIZUNO KUNIHIRO
分类号 G01M11/00;G01N21/89 主分类号 G01M11/00
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