| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope which is easy in aberration correction even at the time of high magnification observation. SOLUTION: The electron microscope is provided with a spherical aberration correction device 14, a transmission lens system 15 which is installed between the spherical aberration correction device 14 and an objective lens 17, an aperture diaphragm 13 which is installed movably with respect to the optical axis 2 at the front stage of the spherical aberration correction device 14, and an aperture angle diaphragm 16 which is movably installed with respect to the optical axis 2 at the main face or its vicinity of the transmission lens system 15 and adjusts the aperture angle of electron beams. COPYRIGHT: (C)2010,JPO&INPIT
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