PLASMA LIGHT SOURCE AND PLASMA LIGHT GENERATING METHOD

摘要

Provided is a plasma light source which can generate a high-intensity light even in, especially, the ultraviolet light range. The plasma light source is comprised of a pair of magnetization coaxial guns (MG1, MG2) and a magnetic flux holding container (3). The magnetization coaxial guns are opposed to each other, and respectively have inner conductors (11, 21); cylindrical outer conductors (12, 22) which are coaxial with the inner conductors, and have open ends, respectively; bias coils (BM1, BM2) wound around the outer conductors; and power supply circuits (14, 24) which supply power between the inner conductors and the outer conductors. The magnetic flux holding container (3) is comprised of a pair of opposed gun coupling openings (31, 32) which are connected to the open ends of the outer conductors, respectively; and a window portion (33) for introducing light.