发明名称 METHOD OF TREATING A SURFACE OF AT LEAST ONE PART BY MEANS OF INDIVIDUAL SOURCES OF AN ELECTRON CYCLOTRON RESONANCE PLASMA
摘要 This method consists in subjecting the part or parts (1) to at least one rotational movement with respect to at least one fixed linear row of individual sources (2), said linear row or rows of individual sources (2) being arranged so as to be parallel to the rotation axis or axes of the part or parts.
申请公布号 KR20100071062(A) 申请公布日期 2010.06.28
申请号 KR20107007888 申请日期 2008.10.09
申请人 H.E.F. 发明人 SCHMIDT BEAT;HEAU CHRISTOPHE;MAURIN PERRIER PHILIPPE
分类号 C23C14/40;C23C14/50;H01J37/32;H05H1/46 主分类号 C23C14/40
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