发明名称 |
METHOD OF TREATING A SURFACE OF AT LEAST ONE PART BY MEANS OF INDIVIDUAL SOURCES OF AN ELECTRON CYCLOTRON RESONANCE PLASMA |
摘要 |
This method consists in subjecting the part or parts (1) to at least one rotational movement with respect to at least one fixed linear row of individual sources (2), said linear row or rows of individual sources (2) being arranged so as to be parallel to the rotation axis or axes of the part or parts.
|
申请公布号 |
KR20100071062(A) |
申请公布日期 |
2010.06.28 |
申请号 |
KR20107007888 |
申请日期 |
2008.10.09 |
申请人 |
H.E.F. |
发明人 |
SCHMIDT BEAT;HEAU CHRISTOPHE;MAURIN PERRIER PHILIPPE |
分类号 |
C23C14/40;C23C14/50;H01J37/32;H05H1/46 |
主分类号 |
C23C14/40 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|