| 摘要 |
PURPOSE: A raw material gasogene and a film forming device thereof are provided to execute a stable film forming process by acquiring a stable amount of raw material gas throughout the long time while preventing deterioration or degeneration. CONSTITUTION: A liquid storing part(28) stores a liquid raw material which is obtained by liquefying a solid material. A solid material supplying part(21) supplies the solid material to the first area of the liquid storing part. A discharge hole discharges the raw material gas which is obtained by evaporating the liquid material in the second region of the liquid storing part. A liquid surface level detection part detects the liquid surface level of the liquid storing part. A controlling part controls the supply operation of the solid material based on the detection result of the liquid surface level detection part.
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