| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method which can enhance the efficiency of treating an etchant by electrolytic oxidation treatment, and besides, can facilitate the maintenance of an electrolytic treatment apparatus, in a method of recovering and/or maintaining etching performance by electrolytically anodizing the etchant containing a manganese salt as an effective component. <P>SOLUTION: This method is useful for a process of electrolytically treating the etchant which is an aqueous solution containing 20-1,200 g/L of an inorganic acid, 0.01-40 g/L of a manganese salt and 1-200 g/L of at least one component selected from the group consisting of perhalogen acids and salts thereof, and includes electrolytically anodizing the etchant in which the concentration of the halogen acid and/or the salt thereof has increased due to use, by using the electrolytic treatment apparatus having a cathode chamber that is separated from the etchant of an object to be treated by a cation exchange membrane formed from a perfluorosulphonic acid resin. <P>COPYRIGHT: (C)2010,JPO&INPIT |
