| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus, in which a liquid resin is spin-coated on the surface of a workpiece combined with an annular frame through an adhesive tape and, subsequently, the frame is attached to a pad by an action of negative pressure and transferred, and then the frame is securely and promptly taken away from the pad at a place to which the frame is transferred. <P>SOLUTION: A pad 54, which is attached to a frame 4 by suction, is firmly fixed to a lower edge of a housing 71 communicated to a negative pressure source 83 and a positive pressure source 84 through a pipe 81 and piping 82. A pusher 73 is arranged so as to advance or retreat in the housing 71, and an upper and lower atmosphere of the pusher 73 in the housing 71 is divided into a high-pressure chamber 75 on the side of the pad 54 and a low-pressure chamber 76 on the side of the pipe 81 with rings 74 prepared in the pusher 73. By sending air into the high-pressure chamber 75 in the housing 71 from the positive pressure source 84 and causing internal pressure in the high-pressure chamber 75 to rise, the pusher 73 is made to descend and the frame 4 is pressed with the pusher 73 to force the frame 4 apart from the pad 54. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
