| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum suction apparatus that keeps or improves the pressure capacity of a pad and achieves uniform distribution of flow rate from the entire surface of the pad. SOLUTION: The vacuum suction apparatus includes: a plurality of circular grooves 21 on the backside of a vacuum suction pad 2 made of a porous material that sucks and holds a workpiece by its surface and of which backside is communicated with a vacuum source; and a communication groove 22 to radially communicate the circular grooves with each other. A groove-like clearance is made between the backside of the vacuum suction pad and the inside bottom of a holder 3. In addition, the communication groove is displaced from the identical radial line, so as to disperse stress applied to the communication groove from the identical radial line. COPYRIGHT: (C)2010,JPO&INPIT |
