发明名称 VIEWING TOOL FOR MONITORING GROWTH OF SINGLE CRYSTAL AND APPARATUS FOR GROWING SINGLE CRYSTAL INCLUDING THE SAME
摘要 PURPOSE: An observation mechanism monitoring the single crystal growth and an apparatus for single crystal growth including the same are provided to establish the variant part for angle control in the body portion. The viewing angle of the observation mechanism is varied variously. CONSTITUTION: It is installed in the apparatus for single crystal growth and an observation mechanism monitors the growth of the mono crystal inside a chamber(10). The observation mechanism comprises a body portion(30) of barrel. The body portion faces the crucible within the chamber through the chamber. The lens(20) is installed in the leading end of the body portion. In the body portion, the variant part for the angle adjusting is installed.
申请公布号 KR20100033108(A) 申请公布日期 2010.03.29
申请号 KR20080092103 申请日期 2008.09.19
申请人 NEOSEMITECH INC. 发明人 HEO, SUN;SEO, SOO HYUNG;SEOL, CHANG WOOK;SONG, JOON SUK;OH, MYUNG HWAN
分类号 C30B35/00;C30B15/20 主分类号 C30B35/00
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