Very high-density three-dimensional structure

摘要

The structure has a large number of parallelepipedic thin blades (21) extending from bottom of a recess to a substrate surface while being oriented perpendicular to each other and formed in a pattern covering whole surface of the recess. Some of the blades are placed non-secant to one of walls (13-19), where each non-secant blade is connected to one of the walls by another perpendicular blade. The substrate and the blades are made of silicon. The blades have a thickness smaller than 0.8 micrometer, and are separated from each other by distance shorter than 0.8 micrometer.