| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a liquid ejecting head capable of good printing and excellent in aging characteristic, and to provide its manufacturing method. <P>SOLUTION: The liquid ejecting head 50 includes a pressure chamber substrate 52 with a pressure chamber 521, a diaphragm 55 prepared on one side of the pressure chamber substrate, a piezoelectric element 54 set above the diaphragm and at a position corresponding to the pressure chamber, and a nozzle plate 51 formed on the other side of the pressure chamber substrate and having a nozzle hole which communicates with the pressure chamber. The piezoelectric element has a lower electrode 4, an orientation layer 7 formed above the lower electrode, a piezoelectric layer 5 formed above the orientation layer, and an upper electrode 6 formed above the piezoelectric layer. The orientation layer 7 includes a mixed crystal of lanthanum nickelate. When the lanthanum nickelate included in the mixed crystal is expressed by the formula of La<SB>x</SB>Ni<SB>y</SB>O<SB>z</SB>, x is an integer of any of 1-3, y is 1 or 2, and z is an integer of any of 2-7. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
