METHOD FOR CONTROLLING REACTIVE SPUTTERING PROCESSES,申请号EP20010938052-传众专利搜索

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发明名称	METHOD FOR CONTROLLING REACTIVE SPUTTERING PROCESSES
摘要
申请公布号	EP1268872(B2)	申请公布日期	2010.01.20
申请号	EP20010938052	申请日期	2001.03.27
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	BRINGMANN, UDO;HOEING, THOMAS;MALKOMES, NIELS;SZYSZKA, BERND;VERGOEHL, MICHAEL;POECKELMANN, RALF
分类号	C23C14/00	主分类号	C23C14/00
代理机构		代理人
主权项
地址

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