COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS FOR DETERMINING ONE OR MORE CHARACTERISTICS OF A WAFER,申请号WO2009US47932-传众专利搜索

发明名称	COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS FOR DETERMINING ONE OR MORE CHARACTERISTICS OF A WAFER
摘要	Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer are provided.
申请公布号	WO2009155502(A2)	申请公布日期	2009.12.23
申请号	WO2009US47932	申请日期	2009.06.19
申请人	KLA-TENCOR CORPORATION;CHEN, HAIGUANG;KAVALDJIEV, DANIEL;VINTRO, LOUIS;KREN, GEORGE	发明人	CHEN, HAIGUANG;KAVALDJIEV, DANIEL;VINTRO, LOUIS;KREN, GEORGE
分类号	H01L21/66;G06F19/00	主分类号	H01L21/66
代理机构		代理人
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