| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a temperature and humidity regulator for regulating efficiently a humidity, without using a wasteful energy. <P>SOLUTION: This temperature and humidity regulator includes the first heating circuit with the first heating medium distributed by the first distributor 20 and circulated, the first cooling circuit in which a residual part of the first heating medium distributed to a first heating circuit side by the first distributor 20 is distributed and circulated, the second heating circuit with the second heating medium distributed by the second distributor 70 and circulated, the second cooling circuit in which a residual part of the second heating medium distributed to a second heating circuit side by the second distributor 70 is distributed and circulated, a vaporization filter 11 arranged in a gas passing position, a moisture supply means 15 for supplying moisture to the vaporization filter 11, the first control part 22 for controlling the first distributor 20, and for controlling a gas passed through the first heater and the first cooler at a prescribed temperature, and the second control part 72 for controlling the second distributor 70, and for controlling a gas passed through the second heater and the second cooler at a prescribed humidity. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
