DEVICE AND METHOD FOR INSPECTING SEMICONDUCTOR WAFERS

摘要

Semiconductor wafer inspection device (1) comprising a wafer transport arm (30) provided with at least one wafer support element, a wafer gripper (15), the gripper (15) having two distant branches (18, 19) designed to take hold of the opposed edges of the wafer, the gripper (15) being mounted so as to rotate on a shaft in order to be able to rotate the wafer between an approximately horizontal position and an approximately vertical position, and at least two inspection systems placed on one side of the wafer and on the other, in an approximately vertical position symmetrically with respect to the plane passing through the wafer.