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发明名称
RANDRAD-TROCKENVERTEILER
摘要
申请公布号
AT447238(T)
申请公布日期
2009.11.15
申请号
AT20040815000T
申请日期
2004.12.20
申请人
LAM RESEARCH CORPORATION
发明人
DAVIS, GLENN;WOODS, CARL;PARKS, JOHN;REDEKER, FRED;RAVKIN, MIKE;ORBOCK, MICHAEL
分类号
H01L21/00;H01L21/687
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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