发明名称 CHUCK FOR LASER INDUCED THERMAL IMAGING AND LASER INDUCED THERMAL IMAGING APPARATUS HAVING THE SAME
摘要 PURPOSE: A chuck for laser induced thermal imaging and a laser induced thermal imaging apparatus having the same are provided to perform the lamination by removing the air gap between a donor film and an acceptor substrate. CONSTITUTION: A chuck for laser induced thermal imaging and a laser induced thermal imaging apparatus having the same include a substrate seat(110), an extension part(120), and a part of vacuum offering part(200). The first vacuum holes are formed in one side and the other side of the substrate seat. The acceptor substrate is settled in the substrate seat. The extension part is extended to be inclined from two part of the substrate seat. The extension part supports the both end parts of the donor film settled in the acceptor top of the substrate.
申请公布号 KR20090111159(A) 申请公布日期 2009.10.26
申请号 KR20080036780 申请日期 2008.04.21
申请人 SAMSUNG MOBILE DISPLAY CO., LTD. 发明人 SHIN, MIN SOO
分类号 H01L21/683;B23K26/16 主分类号 H01L21/683
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