| 发明名称 |
POSITION CONTROL WITH COMPENSATION FOR THERMAL CYCLING OF A WORKPIECE SUPPORT |
| 摘要 |
Embodiments of the present invention are directed to establishing a desired position control over a workpiece by compensating for thermal cycling affecting a member supporting the workpiece during processing.
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| 申请公布号 |
US2009230110(A1) |
申请公布日期 |
2009.09.17 |
| 申请号 |
US20080050044 |
申请日期 |
2008.03.17 |
| 申请人 |
SEAGATE TECHNOLOGY LLC |
发明人 |
SHEERAN STEVE;TOFFLE MARK A.;ANDERSON MARK D.;DAHLENBURG RODNEY D.;PRESLY COLIN G.;POISSON PAUL J. |
| 分类号 |
B23K31/00 |
主分类号 |
B23K31/00 |
| 代理机构 |
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