发明名称 ILLUMINATING APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD AND DEVICE MANUFACTURING METHOD
摘要 <p>An illuminating apparatus is provided with a light guide fiber (10), which receives illuminating light emitted from light sources (2a, 2b, 2c) from a plurality of light incoming ports (12a, 12b, 12c) and outputs, from a common light outputting port (14a), at least a part of each illuminating light received by each light incoming port; an illuminating relay optical system (6b) which optically relays the illuminating light emitted from the light source (2b) and permits the relayed light to be a first luminous flux having a first incidence angle so as to introduce the first luminous flux into the light incoming port (12b); and illuminating relay optical systems (6a, 6c), which optically relay the illuminating light emitted from the light sources (2a, 2c) and permit the relayed light to be a second luminous flux having a second incidence angle different from the first incidence angle so as to introduce the second luminous flux into the light incoming ports (12a, 12c).</p>
申请公布号 WO2009093553(A1) 申请公布日期 2009.07.30
申请号 WO2009JP50711 申请日期 2009.01.20
申请人 NIKON CORPORATION;FUKUI, TATSUO;KATO, MASAKI 发明人 FUKUI, TATSUO;KATO, MASAKI
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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