| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a novel micro ceramic coil and its simple production process. <P>SOLUTION: A microsized coil mainly composed of ceramics, e.g., with a coil width of 0.1μm to 100μm and a thickness of 1 nm to 10μm, can be produced by forming a thin film mainly composed of ceramics onto a patterned resist and dissolving the resist using a resist stripper. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
