| 摘要 |
PROBLEM TO BE SOLVED: To provide an auto handler for improving conveyance capability. SOLUTION: This auto handler includes a conveying device 14 having a shuttle 24 for reciprocating between a soak corner C1 and a test port P and a shuttle 25 for reciprocating between the test port P and a corner C2. Before transport by a contact head 18 of all semiconductor devices on a conveyance boat B conveyed to the shuttle 24 is completed, both the shuttles 24 and 25 are moved, and a processing of delivering, to the shuttle 25, the conveyance boat B conveyed to the shuttle 24 by the test port P is performed. COPYRIGHT: (C)2009,JPO&INPIT
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