发明名称 COMPOSITION FOR EXFOLIATION, AND EXFOLIATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a composition for exfoliation which is suitable for exfoliating a direct material from a base material, where the direct material is obtained by photocuring a curable composition containing a polyallylene resin. SOLUTION: The composition for exfoliation contains, as a main component, a solvent A which comprises one or more compounds selected from among a compound group X. The compound group X consists of: a cyclic ether compound having a dielectric constant of 7 or larger; a noncyclic ether alcohol compound having a dielectric constant of 7 or larger; and an amide compound having a dielectric constant of 7 or larger. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009116243(A) 申请公布日期 2009.05.28
申请号 JP20070291917 申请日期 2007.11.09
申请人 ASAHI GLASS CO LTD 发明人 ERIGUCHI TAKESHI;CHO ISAMU;ISHIBASHI YUICHIRO;ITO MASAHIRO
分类号 G03F7/42;H01L21/027;H01L21/312 主分类号 G03F7/42
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