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发明名称
CARRIER PALTE IN DOUBLE SIDE POLISHING APPARATUS FOR SUBSTRATE
摘要
申请公布号
KR20090043194(A)
申请公布日期
2009.05.06
申请号
KR20070108915
申请日期
2007.10.29
申请人
SILTRON INC.
发明人
LEE, YOUNG HO;JUNG, HWAN YUN
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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