| 摘要 |
The invention relates to a device and method for producing a device for the thermally induced field emission of particles for particle-optical devices such as electron or ion microscopes. The device comprises at least one particle emitter (3), which is arranged in a vacuum space (2) or is pointing thereto and has at least one field emitter tip (4) for the emission of particles, and a magnetic field generator (6) allocated to the at least one particle emitter (3) for focussing the emitted particle stream (5). According to the invention, the particle emitter (3) with its field emitter tip (4) is composed of emitter structures (9) which are produced on or in the surface (7) of the side of a substrate (8), facing away from the magnetic field generator (6). The substrate (8) is configured as a dividing wall (2) between the vacuum space (2) and the atmospheric space (10) which is located outside the vacuum space (2). The magnetic field generator (6) is arranged outside the vacuum space (2) on the side (14) of the substrate (8) facing away from the emitter structures (9). |
