| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology for attracting and separating a sample to and from an electrostatic chuck quickly and surely, thus shortening the time required for attraction and separation. SOLUTION: The electrostatic chuck includes a lift pin for holding a sample and moving it to a dielectric surface, and a chuck electrode control section for applying a third voltage when the tip of a lift pin is remote from the dielectric surface, applying a first voltage when the tip of the lift pin is in flush with the dielectric surface, and applying a second voltage lower than the first voltage when the tip of the lift pin comes into the dielectric surface. COPYRIGHT: (C)2009,JPO&INPIT |
