| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron emission element equipped with a conductive membrane which is a thin membrane of thickness of the order of several nm to scores of nm, in which sheet resistance is high resistance of 10 kΩ/square to the order of hundreds of kΩ/square, and in which there are less resistance variations. <P>SOLUTION: The conductive membrane is fabricated by means that a solution containing complex of noble metal and base metal is coated and calcination is carried out in UV-irradiation, wherein membrane thickness is 3 nm to 50 nm, the membrane is composed of the noble metal and the base metal oxide, metal ratio of metal oxide is 30 mol% or more to the noble metal, and the membrane has concentration gradient of the base metal oxide in the membrane thickness direction. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
