| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a fine channel structure, capable of detecting accurately the concentration of liquid flowing in the channel or the concentration of an object material in the liquid, or the like, by forming a plurality of electrodes on the inner surface of the fine channel, and a manufacturing method of the fine channel structure. <P>SOLUTION: In this fine channel structure 10 wherein a fine channel 3 having a prescribed sectional shape is formed in a laminate formed, by laminating successively substrates 1a, 1b, 1c having each electrode 2a, 2b, 2c comprising a thin film and formed thereon, the fine channel 3 is formed in the vertical directionβvertical to the lamination directionαof the laminate, and each inner surface 3a, 3b of the fine channel 3 has an acute angleθ, with respect to the lamination directionαof the laminate, and the plurality of electrodes 2a, 2b, 2c are formed in a state exposed in the laminating directionαof each inner surface 3a, 3b of the fine channel 3. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
