METHOD FOR MANUFACTURING ORGANIC ELECTROLUMINESCENCE DEVICE

摘要

Provided is a method for manufacturing an organic EL device, by which a damage applied to an inorganic EL element is suppressed at the time of forming a film including an inorganic material layer for sealing the organic EL element. An organic EL element (20) is constituted by sandwiching an organic EL layer (22) including a light emitting layer between a pair of electrodes of which at last one electrode is transparent or translucent. A sealing layer (30) includes at least one inorganic material film brought into contact with the organic EL element (20) and seals the organic EL element (20). At the time of forming the organic EL element and the sealing layer on a substrate (10), a first sealing film (31) brought into contact with the organic EL element (20) in the sealing layer (30) is formed by a facing target sputtering method, and other inorganic films in the sealing layer (30) are formed by film forming methods other than the facing target sputtering method.