| 摘要 |
A strain gauge type sensor and a strain gauge type sensor unit using the sensor are improved in sensitivity. In a strain gauge type sensor 1 for measuring at least one of multiaxial force, moment, acceleration, and angular acceleration, externally applied, diaphragms 15 and 16 different in thickness are formed at inner and outer edges of a substantially disk-shaped interconnecting portion 13 interconnecting a vicinity of an upper end of a force receiving portion 11 and a fixed portion 12 disposed around the force receiving portion 11 . The thicknesses of the diaphragms 15 and 16 are determined such that strains at intersections of a straight line extending through an origin O with the diaphragms 15 and 16 are equal to each other. Strain gauges are disposed at the intersections of the straight line extending through the origin O with the diaphragms 15 and 16.
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