| 摘要 |
PROBLEM TO BE SOLVED: To allow measurement in a measuring face forming a large inclination angle with respect to a reference face and directed along an optional direction, by simple constitution compared with the prior art, in the shape measurement for measuring a position along a direction orthogonal to the prescribed reference face. SOLUTION: This shape measuring instrument 1 is constituted of multidimensional moving means 11, 30 for moving a sample W relatively to a probe 20 along at least two axial directions (X, Y) to scan a surface of the sample W with the probe 20, a sample block 12 for mounting the sample W and having an inclined face inclined with respect to an axis Z orthogonal to the two axial directions (X, Y), and a rotary means for rotating the sample block 12, using a vertical axis A of the inclined face as a rotation axis. COPYRIGHT: (C)2009,JPO&INPIT
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