| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gray tone mask of a halftone film type by which a high-quality TFT can be manufactured. <P>SOLUTION: The gray tone mask for manufacturing a thin film transistor substrate has a pattern for a thin film transistor substrate, the pattern including a light-shielding part, a light transmitting part and a light semitransmitting part formed by patterning a light semitransmitting film and a light-shielding film formed on a transparent substrate. The pattern for a TFT substrate includes patterns corresponding to a source and a drain and comprising two light-shielding parts separated from each other and a pattern corresponding to a channel part adjoining to and interposed between the above two light-shielding parts and comprising a light semitransmitting part, and includes a portion where the two light-shielding parts and the semitransmitting part interposed therebetween are arranged in one direction; wherein in an adjoining portion between the channel part and the source and between the channel part and the drain, a light semitransmitting film with addition of a desired margin region is formed in a region corresponding to the channel part. <P>COPYRIGHT: (C)2009,JPO&INPIT |
